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sizeof(simd12_t)used to return 16 - that could produce some garbage values in upper 4 bytes, e.g.:; Method Program:Test():System.Numerics.Vector3:this G_M16498_IG01: vzeroupper ;; size=3 bbWeight=1 PerfScore 1.00 G_M16498_IG02: vmovups xmm0, xmmword ptr [reloc @RWD00] vmovups xmm1, xmmword ptr [reloc @RWD00] vdpps xmm0, xmm0, xmm1, 127 vmulps xmm0, xmm0, xmm1 vmovups xmm1, xmmword ptr [reloc @RWD16] vmulps xmm0, xmm0, xmm1 vmovups xmm1, xmmword ptr [reloc @RWD00] vsubps xmm0, xmm1, xmm0 vmovsd qword ptr [rdx], xmm0 vextractps dword ptr [rdx+08H], xmm0, 2 mov rax, rdx ;; size=64 bbWeight=1 PerfScore 39.25 G_M16498_IG03: ret ;; size=1 bbWeight=1 PerfScore 1.00 -RWD00 dq 3F80000040400000h, DDDDDDDD3F800000h +RWD00 dq 3F80000040400000h, 000000003F800000h -RWD16 dq 4000000040000000h, DDDDDDDD40000000h +RWD16 dq 4000000040000000h, 0000000040000000h ; Total bytes of code: 68so I applied the #include "pshpack4.h" fix @tannergooding suggested